摘要：With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil *** with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis *** ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are *** dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%.

摘要：The design,fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are *** consistency of the resonance frequency and the sensitivity of the array are ***,we detect the directivity and the multi-target identification ability of the *** results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical *** paper analyzes this problem in detail and points out the direction of *** for the directivity,the actual result is consistent with the theoretical *** results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72°when the distance between the sensor array and measured objects is 2 m.

摘要：这份报纸基于诱导地联合的电感器和洞(LC ) 为无线被动压力传感器论述一个新奇读出系统反响的电路。建议系统由诱导地联合到传感器电路，一个读出电路，和处理联合起来的一张个人计算机(PC ) 帖子的一条阅读器天线组成。读出电路产生代表传感器电容的一个电压信号。驾驶信号的读者天线的频率是一个常数，它等于传感器在零个压力的反响的频率。基于机械、电建模，压力传感器设计基于高温度共同开火陶器(HTCC ) 技术被进行并且讨论。读出系统的功能和精确性与一个电压电容测量系统被测试并且在现实主义的压力测量环境示威了，以便全面表演和读出系统的可行性被证明。