摘要：In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of *** eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation *** addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in *** tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning *** results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm.