摘要：A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more *** this project,we build the stageactions in an Arduino microcontroller,and finite state machine(FSM)is also built in the Arduino micro controller to communicatewith a computer and a radio frequency(RF)controller.A special displaying scheme with five states is employed to indicatethe operation of the ***,the stage is fully tested and has a700nm resolution in Z motion of the SPM.