摘要：A biomimetic three-dimensional piezoresistive vibration sensor based on MEMS technology is reported. The mechanical properties of the sensor are analyzed and the static and dynamic characteristics of the sensor are simulated by ANSYS Workbenchl2.0. The structure was made by MEMS processes including lithography, ion implantation, PECVD, etching, etc. Finally, the sensor is tested by using a TV5220 sensor auto calibration system. The results show that the lowest sensitivity of the sensor is 394.7μV/g and can reach up to 460.2 μV/g, and the dimension coupling is less than 0.6152%, and the working frequency range is 0-1000 Hz.

摘要：The design,fabrication and packaging of a type of MEMS piezoresistive ultrasonic transducer array are *** consistency of the resonance frequency and the sensitivity of the array are ***,we detect the directivity and the multi-target identification ability of the *** results of the consistency of the resonance frequency and the sensitivity show that there is a gap between the practical and theoretical *** paper analyzes this problem in detail and points out the direction of *** for the directivity,the actual result is consistent with the theoretical *** results of multiple target distinguishing tests demonstrate that the smallest resolution angle of the array is 5.72°when the distance between the sensor array and measured objects is 2 m.

摘要：With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization, integration,high reliability,and high resolution,and shares extensive application prospects in military and civil *** with the traditional single cantilever beam structure or ＂cantilever-mass＂ structure,the proposed structure of ＂8-beams/mass＂ with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial accelerometer in this paper has a higher axial sensitivity and smaller cross-axis *** ANSYS, the process of structural analysis and the manufacturing flow of sensing unit are *** dynamic testing conditions, it can be concluded that the axial sensitivity of x,y,and z are Sx-48μV/g,Sy = 54μV/g and Sz = 217μV/g respectively,and the nonlinearities are 0.4%,0.6%and 0.4%.

摘要：This paper presents a transimpedance amplifier （TIA） capacitance detection circuit aimed at detecting micro-capacitance, which is caused by ultrasonic stimulation applied to the capacitive micro-machined ultrasonic transducer （CMUT）. In the capacitance interface, a TIA is adopted to amplify the received signal with a center frequency of 400 kHz, and finally detect ultrasound pressure. The circuit has a strong anti-stray property and this paper also studies the calculation of compensation capacity in detail. To ensure high resolution, noise analysis is conducted. After optimization, the detected minimum ultrasound pressure is 2.1 Pa, which is two orders of magni- tude higher than the former. The test results showed that the circuit was sensitive to changes in ultrasound pressure and the distance between the CMUT and stumbling block, which also successfully demonstrates the functionality of the developed TIA of the analog-front-end receiver.

摘要：A kind of piezoresistive ultrasonic sensor based on MEMS is proposed,which is composed of a membrane and two side beams.A simplified mathematical model has been established to analyze the mechanical properties of the *** the basis of the theoretical analysis,the structural size and layout location of the piezoresistors are determined by simulation *** boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic *** membrane-beam microstructure is fabricated integrally by MEMS manufacturing ***,this paper presents the experimental characterization of the ultrasonic sensor,validating the theoretical model used and the simulated *** sensitivity reaches -116.2 dB（0 dB reference = 1 V/μbar,31 kHz）,resonant frequency is 39.6 kHz,direction angle is 55°.

摘要：This paper proposes the design and research on the high bandwidth linear frequency sweep signal source involved in the readout unit module of the wireless passive pressure sensor in high temperature based on the principle of mutual inductance coupling which is applied widely at present. The operating principle of the linear sweep frequency source based on the direct digital frequency synthesis （DDS） technology is introduced, and the implementation method of the hardware circuit and logic sequential control process required in our system has been realized utilizing this technology. Through the experiments under different conditions of the step value, the sweep range and other related design indicators, the influence on the extraction method of resonance frequency information, extraction accuracy, and others during the readout system of the mutual inductance coupling sensor are analyzed and studied. The design of the linear frequency sweep signal source is realized with a resonance frequency change resolution of 6 kHz, a minimum step value of 1 kHz, and a precision of frequency for 0.116 Hz within the sweep width of 1 MHz - 100MHz. Due to the use of the integrated commercial chip, the linear sweep frequency source is made small in size, high working frequency, high resolution and low step values for the readout unit modularized of a higher application value.

摘要：The attitude adjustment of rope system faces the challenging due to the difficulty in obtaining accurate three-dimensional(3D)mathematical model and solving by traditional methods.A set of adjustment systems is designed and used to investigate the automatic control for level or preset attitude adjustment of unknown weights and eccentric *** system principle and characteristics are *** 3D model is decomposed into two two-dimensional(2D)subsystems,and an adaptive fuzzy controller based on BP neural network and least squares(LSE)is *** simulation experiment uses MATLAB to train the level-adjustment data for testing algorithm,and a small load is used to verify the effectiveness of the *** experimental results show that precise attitude adjustment can be achieved within the system load range,and the response speed is *** adjustment method provides a fast and effective method for precise adjustment of the load attitude.

摘要：Referring to the shortages that the process of traditional greenhouse measurement by using thermometer and hygrometer is complex,the measurement result is not accurate,and the control system operation is cumbersome,a greenhouse temperature and humidity(TH)control system based on CC3200 is *** system uses FPGA as the main controller,sends the TH signals to the wireless module CC3200 by controlling *** proposed system realizes the remote transmission of data and the automatic control of system.

摘要：Flexible wearable sensors with excellent electric response and self-powered capability have become an appealing hotspot for personal healthcare and human-machine ***,based on triboelectric nanogenerator(TENG),a flexible self-powered tactile sensor composed of micro-frustum-arrays-structured polydimethylsiloxane(PDMS)film/copper(Cu)electrodes,and poly(vinylidenefluoride-trifluoroethylene)(P(VDF-TrFE))nanofibers has been *** TENG-based self-powered tactile sensor can generate electrical signals through the contact-separation process of two triboelectric layers under external mechanical *** to the uniform and controllable micro-frustum-arrays structure fabricated by micro-electro-mechanical system(MEMS)process and the P(VDF-TrFE)nanofibers fabricated by electrostatic spinning,the flexible PDMS-based sensor presents high sensitivity of 2.97 V kPa^-1,stability of 40,000 cycles(no significant decay),response time of 60 ms at 1 Hz,low detection pressure of a water drop(~4 Pa,35 mg)and good linearity of 0.99231 in low pressure *** the PDMS film presents ultra-flexibility and excellent-biocompatibility,the sensor can be comfortably attached on human ***,the tactile sensor can recognize various types of human body movements by the corresponding electrical ***,the as-prepared TENGs are potential on the prospects of gesture detection,health assessment,human-machine interfaces and so on.

摘要：A piezoelectric sensor charge/voltage conversion circuit is designed based on the principle that piezoelectric sensor can convert the vibration or shock acceleration into the charge *** of temperature characteristic of feedback capacitor on the switching circuit output is analyzed based on the acquisition and measurement system in this *** characteristics of different filters are analyzed,and the corresponding filter circuit is configured according to the actual sensor *** show that the circuit can effectively filter out noises among the vibration signal and obtain vibration signal accurately.